XRD and AFM Analysis of Iron Oxide (Fe2O3) Thin Films Prepared by Chemical Spray Pyrolysis Method: The Effect of Substrate Temperature

Abstract

Iron Oxide (Fe2O3) thin films were prepared by Chemical Spray Pyrolysis technique, on glass substrates at (400,450,500)°C , XRD analysis reveals that all the prepared films were polycrystalline and Hexagonal with a preferred orientation a long (104) plane, The increase in temperature cause an increase in the crystallization of film and homogeneity in addition to increase the grain size, It has been found that an increase in temperature leads to an increase in the crystalline grain size and working to improve the crystal structure. Moreover, the results showed an atomic force microscope (AFM) an increase in the values of the square root of the mean square roughness (RMS), an increase of temperature.