The Effect of Spin Coating Speed and deposition parameters on the Crystalline Size of ZnO Thin Films

Abstract

ZnO thin films have been deposited onto the glass-substrates by the sol-gel spin coating method at different chuck rotation rates. This method was used for the preparation of thin films on the important semiconductors ІІ-VІ. The effect of deposition parameters on the structural, optical and electrical properties of the ZnO thin film was investigated. Zinc acetate dehydrate, 2- methoxethanol and monoethanolamine (MEA) were used as a starting material, solvent and stabilizer, respectively. XRD of the dried gel showed that weight loss continued until 300°C, with smallest particle size at 400 rpm spin coating speed.